Abstract
We have investigated the stationary parameters and the composition of the DC glow discharge plasma (p = 40–200 Pa, i = 30–70 mA) in methane by means of the probe technique and numerical simulation. We have obtained data on the reduced strength of the electric field, on the rate constants of the processes under electron impact, and on the stationary concentrations of the neutral and charged particles.
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Original Russian Text © O.A. Semenova, A.M. Efremov, S.M. Barinov, V.I. Svettsov, 2014, published in Teplofizika Vysokikh Temperatur, 2014, Vol. 52, No. 3, pp. 357–364.
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Semenova, O.A., Efremov, A.M., Barinov, S.M. et al. Kinetics and concentration of active particles in nonequilibrium low temperature methane plasma. High Temp 52, 348–354 (2014). https://doi.org/10.1134/S0018151X14020205
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DOI: https://doi.org/10.1134/S0018151X14020205