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Preparation of diamond-like films in the process of magnetron sputtering of graphite target

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Original Russian Text © A.V. Kostanovskii, L.A. Zhilyakov, A.A. Pronkin, A.V. Kirillin, 2009, published in Teplofizika Vysokikh Temperatur, Vol. 47, No. 1, 2009, pp. 141–143.

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Kostanovskii, A.V., Zhilyakov, L.A., Pronkin, A.A. et al. Preparation of diamond-like films in the process of magnetron sputtering of graphite target. High Temp 47, 136–138 (2009). https://doi.org/10.1134/S0018151X09010180

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  • DOI: https://doi.org/10.1134/S0018151X09010180

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