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Effect of Irradiation with Fe7+ Ions on the Structural Properties of TiO2 Films

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Abstract

Thin TiO2-based foils with a thickness of 620 nm were obtained using magnetron sputtering. The samples were irradiated with 85-MeV Fe7+ ions with a fluence of 1 × 1011 to 1 × 1014 ion/cm2. The dose dependence of changes in the concentration of defects in the structure of the thin films was determined. It was established that an increase in the crystal lattice parameters and a decrease in the density due to the formation of disorder regions and displaced atoms in the structure leads to a change in interplanar distances and an increase in deformation and stresses in the crystal lattice structure.

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Authors and Affiliations

  1. Institute of Nuclear Physics, 050032, Almaty, Kazakhstan

    A. L. Kozlovskiy & M. V. Zdorovets

  2. Gumilyov Eurasian National University, 010000, Astana, Kazakhstan

    A. L. Kozlovskiy & M. V. Zdorovets

  3. School of Engineering, Nazarbayev University, Astana, Kazakhstan

    K. Dukenbaev

  4. Ural State University, 620002, Yekaterinburg, Russia

    M. V. Zdorovets

Authors
  1. A. L. Kozlovskiy
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  2. K. Dukenbaev
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  3. M. V. Zdorovets
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Corresponding author

Correspondence to A. L. Kozlovskiy.

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Translated by V. Makhlyarchuk

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Kozlovskiy, A.L., Dukenbaev, K. & Zdorovets, M.V. Effect of Irradiation with Fe7+ Ions on the Structural Properties of TiO2 Films. High Energy Chem 53, 321–325 (2019). https://doi.org/10.1134/S001814391904009X

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  • DOI: https://doi.org/10.1134/S001814391904009X

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