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Features of germanium tetrafluoride reduction with hydrogen in inductively and capacitively coupled radiofrequency discharges

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Abstract

The process of plasma-chemical conversion of germanium tetrafluoride in a radiofrequency discharge (13.56 MHz) has been studied. The dependences of the germanium yield on the specific energy input, the H2/GeF4 molar ratio, and the total pressure have been measured. The maximum germanium yield is more than 95%. The minimum specific energy consumption at an energy input of 9 MJ/mol is 9.4 MJ/mol or 2.6 kW h/mol Ge. A mechanism of plasma-assisted reduction of germanium tetrafluoride under the given the experimental conditions has been proposed.

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Authors and Affiliations

  1. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, Nizhny Novgorod, 603950, Russia

    R. A. Kornev, P. G. Sennikov & D. A. Konychev

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  1. R. A. Kornev
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  2. P. G. Sennikov
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  3. D. A. Konychev
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Correspondence to R. A. Kornev.

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Original Russian Text © R.A. Kornev, P.G. Sennikov, D.A. Konychev, 2017, published in Khimiya Vysokikh Energii, 2017, Vol. 51, No. 1, pp. 60–63.

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Kornev, R.A., Sennikov, P.G. & Konychev, D.A. Features of germanium tetrafluoride reduction with hydrogen in inductively and capacitively coupled radiofrequency discharges. High Energy Chem 51, 56–59 (2017). https://doi.org/10.1134/S0018143916060072

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  • DOI: https://doi.org/10.1134/S0018143916060072

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