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A study of silicon tetrachloride reduction with hydrogen in microwave discharge

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Correspondence to R. A. Kornev.

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Original Russian Text © A.V. Gusev, R.A. Kornev, A.Yu. Sukhanov, 2013, published in Khimiya Vysokikh Energii, 2013, Vol. 47, No. 5, pp. 403–405.

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Gusev, A.V., Kornev, R.A. & Sukhanov, A.Y. A study of silicon tetrachloride reduction with hydrogen in microwave discharge. High Energy Chem 47, 270–272 (2013). https://doi.org/10.1134/S0018143913050032

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  • DOI: https://doi.org/10.1134/S0018143913050032

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