Skip to main content

Photocatalytic lithography based on thin films of amorphous hydrated titanium dioxide

Abstract

The mechanism of photoactivation of amorphous hydrated titanium dioxide thin films containing palladium ions toward the reaction of electroless deposition of nickel was studied. It was shown that the photocatalytic reduction of palladium ions during UV irradiation results in the formation of intermediate Pd(I) states that subsequently disproportionate, yielding a Pd nanophase. The palladium nanoparticle-catalyzed electroless deposition of nickel on exposed areas of the titanium dioxide photolayer makes it possible to fabricate metal patterns having a 5-μm resolution, with the fast and irreversible capture of photoelectrons at the latent image formation step preventing the image from blurring, including the process on conducting substrates.

This is a preview of subscription content, access via your institution.

References

  1. Jonker, H., Dippel, C.J., Houtman, H.J., Janssen, C.J.G.F., and van Beek, L.K.H., Photogr. Sci. Eng., 1969, vol. 13, no. 1, p. 1.

    CAS  Google Scholar 

  2. Sviridov, V.V., Sokolov, V.G., and Branitskii, G.A., Signal AM, 1984, vol. 12, no. 4, p. 211.

    CAS  Google Scholar 

  3. Kelly, J.J. and Vondeling, J.K., J. Electrochem. Soc., 1975, vol. 122, no. 8, p. 1103.

    CAS  Article  Google Scholar 

  4. Yoshiki, H., Kitahara, H., Hashimoto, K., and Fujishima, A., J. Electrochem. Soc., 1995, vol. 142, no. 12, p. L235.

    CAS  Article  Google Scholar 

  5. Nechepurenko, Yu.V. and Sokolov, V.G., Zh. Nauchn. Prikl. Fotogr., 1993, vol. 38, no. 6, p. 61.

    CAS  Google Scholar 

  6. Sun, R.D., Tryk, D.A., Hashimoto, K., and Fujishima, A., Electrochem. Solid-State Lett., 1998, vol. 1, no. 1, p. 29.

    CAS  Article  Google Scholar 

  7. Noh, C.H., Kim, J.Y., Hwang, O.C., Cho, S.H., Song, K.Y., Byk, T.V., Sokolov, V.G., Gaevskaya, T.V., and Kim, J.B., Electrochem. Solid-State Lett., 2005, vol. 8, no. 1, p. 1.

    Google Scholar 

  8. Nechepurenko, Yu.V., Orisheva, R.M., Sokolov, V.G., and Sviridov, V.V., Zh. Nauchn. Prikl. Fotogr. Kinematogr., 1987, vol. 32, no. 1, p. 13.

    CAS  Google Scholar 

  9. Byk, T.V., Sokolov, V.G., Gaevskaya, T.V., Sviridov, D.V., Noh, C.-H., Song, K.Y., and Cho, S.H., Electrochem. Solid-State Lett., 2007, vol. 10, no. 6, p. 63.

    Article  Google Scholar 

  10. Pearlstein, F., Modern Electroplating, Lowenheim, F.A., Ed., New York: Wiley, 1974.

    Google Scholar 

  11. Neserebryanye fotograficheskie protsessy (Nonsilver Photographic Processes) Kartuzhanskii, A.L., Ed., Leningrad: Khimiya, 1984.

    Google Scholar 

  12. Larbot, A., Laaziz, I., Marignan, J., and Quinson, J.F., J. Non-Cryst. Solids, 1992, vol. 147, p. 157.

    Article  Google Scholar 

  13. Xu, L., Fanguy, J.C., Soni, K., and Tao, S., Opt. Lett., 2004, vol. 29, no. 11, p. 1191.

    CAS  Article  Google Scholar 

  14. Hilaire, J., Legare, P., Holl, Y., and Marie, G., Solid State Commun., 1979, vol. 32, no. 1, p. 157.

    CAS  Article  Google Scholar 

  15. Stakheev, A.Yu. and Tkachenko, O.P., Zh. Fiz. Khim., 1998, vol. 72, no. 12, p. 2119.

    CAS  Google Scholar 

  16. Minachev, Kh.M., Antoshin, G.V., and Shpiro, E.S., Izv. Akad. Nauk SSSR, Ser. Khim., 1974, no. 5, p. 1012.

  17. Chang, M.-M., Saji, T., and Bard, A.J., J. Am. Chem. Soc., 1977, vol. 99, no. 16, p. 5399.

    CAS  Article  Google Scholar 

  18. Forouzan, F., Richards, T.C., and Bard, A.J., J. Phys. Chem., 1996, vol. 100, no. 46, p. 18123.

    CAS  Article  Google Scholar 

  19. Gomes, W.P., Freund, T., and Morrison, S.R., J. Electrochem. Soc., 1968, vol. 115, no. 8, p. 818.

    CAS  Article  Google Scholar 

  20. Branitskii, G.A., Vorob’eva, T.N., and Sviridov, V.V., Vestn. Belorus. Gos. Univ., Ser. 2., 1975, no. 2, p. 3.

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to D. V. Sviridov.

Additional information

Original Russian Text © E.V. Skorb, V.G. Sokolov, T.V. Byk, T.V. Gaevskaya, D.V. Sviridov, Chan-Ho Noh, 2008, published in Khimiya Vysokikh Energii, 2008, Vol. 42, No. 2, pp. 158–163.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Skorb, E.V., Sokolov, V.G., Byk, T.V. et al. Photocatalytic lithography based on thin films of amorphous hydrated titanium dioxide. High Energy Chem 42, 127–131 (2008). https://doi.org/10.1134/S0018143908020124

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S0018143908020124

Keywords

  • Palladium
  • Oxalic Acid
  • Glycolic Acid
  • High Energy Chemistry
  • Latent Image