Skip to main content
Log in

Polymers for nanolithography: A new strategy for design and synthesis of copolymers of maleimide, norbornene, and styrene derivatives with hexafluoroisopropanol and tert-butyl carbonate side groups

  • Physical Chemistry
  • Published:
Doklady Physical Chemistry Aims and scope Submit manuscript

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

References

  1. Levenson, M.D., Jpn. J. Appl. Phys. Pt. 1, 1994, vol. 33, no. 12B, pp. 6765–6773.

    Article  CAS  Google Scholar 

  2. Houle, F.A., Hinsberg, W.D., Sanchez, M.I., and Hoffnagle, J.A., J. Vac. Technol. B, 2002, vol. 20, no. 3, pp. 924–931.

    Article  CAS  Google Scholar 

  3. Trouiller, Y., Buffet, N., Mourier, T., et al., Jpn. J. Appl. Phys. Pt. 1, 1998, vol. 37, no. 12B, pp. 6714–6717.

    Article  CAS  Google Scholar 

  4. Acevedo, M., de la Campa, J.G., and de Abujo, J., J. Appl. Polym. Sci., 1989, vol. 38, no. 9, pp. 1745–1759.

    Article  CAS  Google Scholar 

  5. Allen, R.D., Breyta, G., Brock, P., et al., US Patent 7014980, 2006, Ref. Zh. Khim., 2007, no. 5, 19N.247P

  6. Vijayakumar, C.T., Lederer, K., and Kramer, A., J. Polym. Sci.: Polym. Chem. Ed, 1989, vol. 27, no. 8, pp. 2723–2748.

    Article  CAS  Google Scholar 

  7. Ahn, K.-D., Koo, D.-I., and Willson, C.G., Polymer, 1995, vol. 36, no. 13, pp. 2621–2628.

    Article  CAS  Google Scholar 

  8. Przybilla, K.J. and Pawlowski, G., FRG Application for Patent 4 207 261, 1993, Chem. Abstr., 1994, vol. 120, no. 14, p. 165189c.

    Google Scholar 

  9. Ichikawa, R., Hata, M., Okomoto, N., et al., J. Polym. Sci.: Polym. Chem. Ed, 1998, vol. 36, no. 7, pp. 1035–1042.

    Article  CAS  Google Scholar 

  10. Hinsberg, W., Hoffnagle, J., and Houle, F., Solid State Technol., 2000, vol. 43, no. 8, pp. 95–102.

    CAS  Google Scholar 

  11. Scott, A.D. and Hunter, E.J., and Ketkar, S.N, Anal. Chem., 1998, vol. 70, no. 9, pp. 1802–1804.

    Article  CAS  Google Scholar 

  12. Costello, A.R., Smith, J.R., Stark, M.S., and Waddington, D.J., J. Chem. Soc., Faraday Trans., 1996, vol. 92, no. 19, pp. 3497–3507.

    Article  CAS  Google Scholar 

  13. Selatnia, A., Bassus, J., and Lamartine, R., Bull. Soc. Chim. Fr., 1994, vol. 131, no. 4, pp. 360–368.

    CAS  Google Scholar 

  14. Bossard, A.R. and Back, M.H., Can. J. Chem., 1990, vol. 68, no. 8, pp. 1401–1407.

    Article  CAS  Google Scholar 

  15. Vainer, A.Ya., Dyumaev, K.M., Gavrilova, O.B., et al., Dokl. Phys. Chem., 2006, vol. 410,part 2, pp. 279–282 [Dokl. Akad. Nauk, 2006, vol. 410, no. 4, pp. 491–494].

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Additional information

Original Russian Text © A.Ya. Vainer, K.M. Dyumaev, L.A. Eremina, F.I. Mashanskii, Yu.A. Mendeleva, A.I. Tarnopol’skii, 2008, published in Doklady Akademii Nauk, 2008, Vol. 420, No. 1, pp. 62–65.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Vainer, A.Y., Dyumaev, K.M., Eremina, L.A. et al. Polymers for nanolithography: A new strategy for design and synthesis of copolymers of maleimide, norbornene, and styrene derivatives with hexafluoroisopropanol and tert-butyl carbonate side groups. Dokl Phys Chem 420, 88–91 (2008). https://doi.org/10.1134/S0012501608050023

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S0012501608050023

Keywords

Navigation