References
Levenson, M.D., Jpn. J. Appl. Phys. Pt. 1, 1994, vol. 33, no. 12B, pp. 6765–6773.
Houle, F.A., Hinsberg, W.D., Sanchez, M.I., and Hoffnagle, J.A., J. Vac. Technol. B, 2002, vol. 20, no. 3, pp. 924–931.
Trouiller, Y., Buffet, N., Mourier, T., et al., Jpn. J. Appl. Phys. Pt. 1, 1998, vol. 37, no. 12B, pp. 6714–6717.
Acevedo, M., de la Campa, J.G., and de Abujo, J., J. Appl. Polym. Sci., 1989, vol. 38, no. 9, pp. 1745–1759.
Allen, R.D., Breyta, G., Brock, P., et al., US Patent 7014980, 2006, Ref. Zh. Khim., 2007, no. 5, 19N.247P
Vijayakumar, C.T., Lederer, K., and Kramer, A., J. Polym. Sci.: Polym. Chem. Ed, 1989, vol. 27, no. 8, pp. 2723–2748.
Ahn, K.-D., Koo, D.-I., and Willson, C.G., Polymer, 1995, vol. 36, no. 13, pp. 2621–2628.
Przybilla, K.J. and Pawlowski, G., FRG Application for Patent 4 207 261, 1993, Chem. Abstr., 1994, vol. 120, no. 14, p. 165189c.
Ichikawa, R., Hata, M., Okomoto, N., et al., J. Polym. Sci.: Polym. Chem. Ed, 1998, vol. 36, no. 7, pp. 1035–1042.
Hinsberg, W., Hoffnagle, J., and Houle, F., Solid State Technol., 2000, vol. 43, no. 8, pp. 95–102.
Scott, A.D. and Hunter, E.J., and Ketkar, S.N, Anal. Chem., 1998, vol. 70, no. 9, pp. 1802–1804.
Costello, A.R., Smith, J.R., Stark, M.S., and Waddington, D.J., J. Chem. Soc., Faraday Trans., 1996, vol. 92, no. 19, pp. 3497–3507.
Selatnia, A., Bassus, J., and Lamartine, R., Bull. Soc. Chim. Fr., 1994, vol. 131, no. 4, pp. 360–368.
Bossard, A.R. and Back, M.H., Can. J. Chem., 1990, vol. 68, no. 8, pp. 1401–1407.
Vainer, A.Ya., Dyumaev, K.M., Gavrilova, O.B., et al., Dokl. Phys. Chem., 2006, vol. 410,part 2, pp. 279–282 [Dokl. Akad. Nauk, 2006, vol. 410, no. 4, pp. 491–494].
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Original Russian Text © A.Ya. Vainer, K.M. Dyumaev, L.A. Eremina, F.I. Mashanskii, Yu.A. Mendeleva, A.I. Tarnopol’skii, 2008, published in Doklady Akademii Nauk, 2008, Vol. 420, No. 1, pp. 62–65.
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Vainer, A.Y., Dyumaev, K.M., Eremina, L.A. et al. Polymers for nanolithography: A new strategy for design and synthesis of copolymers of maleimide, norbornene, and styrene derivatives with hexafluoroisopropanol and tert-butyl carbonate side groups. Dokl Phys Chem 420, 88–91 (2008). https://doi.org/10.1134/S0012501608050023
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DOI: https://doi.org/10.1134/S0012501608050023