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Silicon pressure transmitters with overload protection

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Abstract

The paper considers protection of silicon tensoresistive sensing elements against overload. A detailed analysis is focused on silicon crystal modeling of sensing elements exposed to pressures exceeding the upper limit of measurements. The existing designs of sensing element membranes and possible configurations of locking elements are summarized. In conclusion, the design of a sensing element in a differential pressure sensor with two locking elements is proposed.

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References

  1. Raspopov, V.Ya., Mikromekhanicheskie pribory: uchebnoe posobie (Micromechanical Devices: A Textbook), Moscow: Mashinostroenie, 2007.

    Google Scholar 

  2. Vaganov, V.I., Integral’nye tenzopreobrazovateli (Integral Strain Gages), Moscow: Energoatomizdat, 1983.

    Google Scholar 

  3. Ushkov, A.V., Development of Design-Manufacturing Methods for Silicon Pressure Sensing Elements with Enhanced Overload Resistance, Cand. Sci. (Eng.) Dissertation, Moscow: Mosk. Gos. Tekh. Univ. im. Baumana, 2008.

    Google Scholar 

  4. Andreev, K.A., Tinyakov, Yu.N., and Shakhnov, V.A., MathematicalModels of Hybrid Sensing Elements of Pressure Sensors, Datch. Sist., 2013, no. 9, pp. 2–9.

    Google Scholar 

  5. Andreev, K.A., Mileshin, S.A., and Tsivinskaya, T.A., Analysis of Methods of Silicon and Glass Electrostatic Welding for High-Precision Sensors Manufacturing, Datch. Sist., 2000, no. 4, pp. 12–22.

    Google Scholar 

  6. Vlasov, A.I., Steshenko, V.B., Nesterov, V.A., and Myslovskii, E.V., Methods of Digital Signal Processing of Diaphragm Type Tactile Sensors, Nauka Obrazov., 2012, no. 5, pp. 1–8.

    Google Scholar 

  7. Myslovskii, E.V., Vlasov, A.I., and Akristinii, M.V., Microcontrollers, Elektron. Komponent., 2002, no. 5, pp. 47–50.

    Google Scholar 

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Authors and Affiliations

  1. Bauman Moscow State University, Moscow, Russia

    K. A. Andreev, A. I. Vlasov & V. A. Shakhnov

Authors
  1. K. A. Andreev
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  2. A. I. Vlasov
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  3. V. A. Shakhnov
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Corresponding author

Correspondence to K. A. Andreev.

Additional information

Original Russian Text © K.A. Andreev, A.I. Vlasov, V.A. Shakhnov, 2014, published in Datchiki i Sistemy, 2014, No. 10, pp. 54–57.

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Andreev, K.A., Vlasov, A.I. & Shakhnov, V.A. Silicon pressure transmitters with overload protection. Autom Remote Control 77, 1281–1285 (2016). https://doi.org/10.1134/S0005117916070146

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  • DOI: https://doi.org/10.1134/S0005117916070146

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