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On the possibility of developing thermoelectric sensors based on multielement higher manganese silicide film structures

Technical Physics volume 50, pages 1370–1373 (2005)Cite this article

Abstract

The possibility of designing thermoelectric sensors based on multielement structures of higher manganese silicide (HMS) polycrystalline films is considered. Test structures with various configurations are developed for studying electrical and thermoelectric parameters of polycrystalline HMS films. The geometrical sizes of the elements of test structures are chosen to match the grain size in polycrystalline HMS films. The test structures are prepared using the planar silicon technology. In these structures, the current-voltage characteristics, Hall constant, charge carrier concentration, and mobility are measured. The thermopower (α) and electrical conductivity (σ) are studied in a temperature range of T = 77–600 K, where α > 250 μV/K and electrical conductivity σ ∼ 20 (Ω cm)−1. It is shown that the sensitivity and thermopowers increase upon a decrease in the cross-sectional area of the elements.

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References

  1. V. K. Zaitsev, in CRC Handbook of Thermoelectrics, Ed. by D. M. Rowe (CRC, New York, 1995), pp. 299–309.

    Google Scholar 

  2. A. Mogilatenko, M. Falke, S. Teichert, et al., Microelectron. Eng. 60, 247 (2002).

    Article  Google Scholar 

  3. Q. Zhang, M. Takeguchi, M. Tanaka, et al., J. Cryst. Growth 237–239, 1956 (2002).

    Google Scholar 

  4. J. Yang, N. F. Chen, Z. Liu, et al., J. Cryst. Growth 226, 517 (2001).

    Google Scholar 

  5. Y. Souno, Y. Maeda, H. Tatsuoka, and H. Kuwabara, J. Cryst. Growth 229, 527 (2001).

    Article  Google Scholar 

  6. S. I. Adasheva, I. Abdullaev, E. L. Vyaz’mina, et al., Izv. Ross. Akad. Nauk, Ser. Fiz. 57, 133 (1993).

    Google Scholar 

  7. V. V. Klechkovskaya, T. S. Kamilov, S. I. Adasheva, et al., Kristallografiya 39, 894 (1994) [Crystallogr. Rep. 39, 815 (1994)].

    Google Scholar 

  8. T. S. Kamilov, A. Zh. Khusanov, M. Bakhadyrkhanov, and D. K. Kobilov, Pis’ma Zh. Tekh. Fiz. 28(22), 11 (2002) [Tech. Phys. Lett. 28, 929 (2002)].

    Google Scholar 

  9. T. S. Kamilov, D. K. Kabilov, A. A. Uzokov, et al., in Proceedings of the 8th Interstate Seminar “Thermoelectrics and Their Application,” St. Petersburg, 2002, pp. 255–259.

  10. T. S. Kamilov, A. A. Uzokov, D. K. Kabilov, et al., in Proceedings of the 22nd International Conference on Thermoelectrics, Herault, 2003, IEEE Catalog No. 03TH8726, pp. 388–390.

  11. T. S. Gudkin, Z. M. Dashevskii, and I. V. Sgibnev, Zavod. Lab. 42, 820 (1976).

    Google Scholar 

  12. S. V. Ordin, T. S. Kamilov, D. K. Kabilov, et al., in Proceedings of the 8th Interstate Seminar “Thermoelectrics and Their Application,” St. Petersburg, 2002, pp. 249–254.

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Authors and Affiliations

  1. State Aviation Institute, Tashkent, 700047, Uzbekistan

    T. S. Kamilov, D. K. Kabilov, I. S. Samiev & Kh. Kh. Khusnutdinova

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  1. T. S. Kamilov
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  2. D. K. Kabilov
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  3. I. S. Samiev
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  4. Kh. Kh. Khusnutdinova
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Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 75, No. 10, 2005, pp. 122–125.

Original Russian Text Copyright © 2005 by Kamilov, Kabilov, Samiev, Khusnutdinova.

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Kamilov, T.S., Kabilov, D.K., Samiev, I.S. et al. On the possibility of developing thermoelectric sensors based on multielement higher manganese silicide film structures. Tech. Phys. 50, 1370–1373 (2005). https://doi.org/10.1134/1.2103289

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  • DOI: https://doi.org/10.1134/1.2103289

Keywords

  • Electrical Conductivity
  • Manganese
  • Charge Carrier
  • Carrier Concentration
  • Test Structure