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Microchannel edge formation in laser-ablated polyimide

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Abstract

Microchannels in polyimide (PI) have been produced by means of laser ablation (LA). The obtained results confirm the possibility of using the LA technology for the functional structure formation on PI-based microfluidic chips (MFCs). The shape of the channel edge may depend on the thermal properties of PI. This circumstance makes it possible to optimize the process of MFC fabrication by selecting a proper PI and the corresponding LA regime. Optimization of the other characteristics, such as mechanical properties and planarity of the MFCs, requires additional investigations.

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Authors and Affiliations

  1. Institute for Analytical Instrumentation, Russian Academy of Sciences, St. Petersburg, 198103, Russia

    A. A. Evstrapov, A. O. Pozdnyakov, S. G. Gornyi & K. V. Yudin

  2. Laser Center Company, St. Petersburg, Russia

    A. A. Evstrapov, A. O. Pozdnyakov, S. G. Gornyi & K. V. Yudin

Authors
  1. A. A. Evstrapov
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  2. A. O. Pozdnyakov
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  3. S. G. Gornyi
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  4. K. V. Yudin
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Translated from Pis’ma v Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l}\) Fiziki, Vol. 31, No. 13, 2005, pp. 10–17.

Original Russian Text Copyright © 2005 by Evstrapov, Pozdnyakov, Gorny\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l}\), Yudin.

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Evstrapov, A.A., Pozdnyakov, A.O., Gornyi, S.G. et al. Microchannel edge formation in laser-ablated polyimide. Tech. Phys. Lett. 31, 541–544 (2005). https://doi.org/10.1134/1.2001048

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  • DOI: https://doi.org/10.1134/1.2001048

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