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A defect-deformation model of the surface roughness formation in semiconductors and metals under laser irradiation

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Abstract

A defect-deformation (DD) model of irregular rough microstructure formation on the surface of semiconductors and metals under laser irradiation is developed. The DD model describes the development of roughness on various (from micron to nanometer) scales and agrees with the experimental data on the relationships between the surface roughness scale and the parameters of laser radiation and processed materials. Possibilities of controlled modification of the characteristics of laser-induced roughness by means of external actions are considered.

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Authors and Affiliations

  1. Moscow State University, Moscow, Russia

    V. I. Emel’yanov & K. M. Karimov

Authors
  1. V. I. Emel’yanov
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  2. K. M. Karimov
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Translated from Pis’ma v Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l}\) Fiziki, Vol. 31, No. 6, 2005, pp. 84–88.

Original Russian Text Copyright © 2005 by Emel’yanov, Karimov.

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Emel’yanov, V.I., Karimov, K.M. A defect-deformation model of the surface roughness formation in semiconductors and metals under laser irradiation. Tech. Phys. Lett. 31, 258–260 (2005). https://doi.org/10.1134/1.1894451

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  • DOI: https://doi.org/10.1134/1.1894451

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