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Vacuum deposition of thin teflon-like films from a supersonic C2F4 jet

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Authors and Affiliations

  1. Kutateladze Institute of Thermal Physics, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent’eva 1, Novosibirsk, 630090, Russia

    A. K. Rebrov, N. I. Timoshenko & A. V. Shishkin

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  1. A. K. Rebrov
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  2. N. I. Timoshenko
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  3. A. V. Shishkin
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__________

Translated from Doklady Akademii Nauk, Vol. 399, No. 6, 2004, pp. 766–769.

Original Russian Text Copyright © 2004 by Rebrov, Timoshenko, Shishkin.

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Rebrov, A.K., Timoshenko, N.I. & Shishkin, A.V. Vacuum deposition of thin teflon-like films from a supersonic C2F4 jet. Dokl. Phys. 49, 739–742 (2004). https://doi.org/10.1134/1.1848629

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