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Effect of self-conjugate perforation in amorphous silicon carbide layers

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Abstract

SiC films on glass substrates are found to have an amorphous structure, high insulating properties, and good mechanical strength. The integrated transmission coefficient of the SiC films in the spectral range λ=0.4–0.7 µm depends on their thickness. The SiC films subjected to etching in hydrofluoric acid exhibit self-conjugate perforation.

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Authors and Affiliations

  1. Novgorod State University, ul. Sankt-Peterburgskaya 41, Novgorod, 173003, Russia

    V. A. Karachinov, S. B. Toritsyn & D. V. Karachinov

Authors
  1. V. A. Karachinov
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  2. S. B. Toritsyn
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  3. D. V. Karachinov
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Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 74, No. 12, 2004, pp. 96–97.

Original Russian Text Copyright © 2004 by V. Karachinov, Toritsyn, D. Karachinov.

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Karachinov, V.A., Toritsyn, S.B. & Karachinov, D.V. Effect of self-conjugate perforation in amorphous silicon carbide layers. Tech. Phys. 49, 1633–1634 (2004). https://doi.org/10.1134/1.1841417

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