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Estimation of SEM imaging resolution of the domain structure of pyroprobe-heated ferroelectrics

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Abstract

The specific contrast of scanning electron microscope (SEM) images of ferroelectric domains observed in the pyrocurrent (pyroprobe) mode is analyzed. Calculations taking into account both the nonuniform heating of domains and the heat diffusion via the domain walls and the crystal boundaries are performed. It is established that the heat diffusion smears the domain images of small domains. Along with the probe diameter, the scan rate is shown to be an important factor determining the character of the SEM image contrast. A decrease in the scan rate may appreciably lower the resolution even in case of a fairly thin probe.

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Authors and Affiliations

  1. Amur State University, Blagoveshchensk, 675027, Russia

    A. A. Sogr & A. G. Maslovskaya

Authors
  1. A. A. Sogr
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  2. A. G. Maslovskaya
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__________

Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 74, No. 11, 2004, pp. 111–114.

Original Russian Text Copyright © 2004 by Sogr, Maslovskaya.

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Sogr, A.A., Maslovskaya, A.G. Estimation of SEM imaging resolution of the domain structure of pyroprobe-heated ferroelectrics. Tech. Phys. 49, 1505–1508 (2004). https://doi.org/10.1134/1.1826199

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  • DOI: https://doi.org/10.1134/1.1826199

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