Abstract
A mechanical model is proposed for the amorphization of solids. The model is based on a concept according to which the accumulation of radiation-induced defects gives rise to forces and force moments that act on local volumes of the material and are responsible for fragmentation. The estimates obtained demonstrate that the proposed model can adequately describe the amorphization of solids only with allowance made for strain waves generated during reactions between defects. This model is consistent with the paracrystalline structure of silicon layers transformed into the amorphous state under ion bombardment.
Similar content being viewed by others
References
E. I. Zorin, P. V. Pavlov, and D. I. Tetelbaum, Ion Doping of Semiconductors (Énergiya, Moscow, 1976) [in Russian].
J. R. Parsons, Philos. Mag. 12(120), 1159 (1965).
L. A. Christel, J. F. Gibbons, and T. W. Sigmon, J. Appl. Phys. 52(12), 7143 (1981).
N. Valenkov and E. Porai-Koshits, Z. Kristallogr. 95(1/4), 195 (1937).
V. P. Zakharov and V. S. Gerasimenko, Structural Features of Semiconductors in the Amorphous State (Naukova Dumka, Kiev, 1976) [in Russian].
D. Polk and D. S. Bondreax, Phys. Rev. Lett. 31(2), 92 (1973).
Ju. Yin Cheng, J. M. Gibson, P. M. Baldo, and B. J. Kestel, J. Vac. Sci. Technol. A 20(6), 1855 (2002).
V. L. Indenbom, Pis’ma Zh. Tekh. Fiz. 5(8), 489 (1979) [Sov. Tech. Phys. Lett. 5, 200 (1979)].
J. D. Eshelby, in Continuous Theory of Dislocations (Inostrannaya Literatura, Moscow, 1966).
A. C. Damask and G. J. Dienes, Point Defects in Metals (Gordon and Breach, New York, 1963; Mir, Moscow, 1966).
P. V. Pavlov, Yu. A. Semin, V. D. Skupov, and D. I. Tetelbaum, Fiz. Tekh. Poluprovodn. (Leningrad) 20(3), 503 (1986) [Sov. Phys. Semicond. 20, 315 (1986)].
M. W. Thompson, Defects and Radiation Damage in Metals (Cambridge Univ. Press, Cambridge, 1969; Mir, Moscow, 1971).
V. L. Vinetskii and G. A. Kholodar’, Radiation Physics of Semiconductors (Naukova Dumka, Kiev, 1979) [in Russian].
I. V. Tereshko, V. I. Khodyrev, É. A. Lipskii, Zh. A. Rymkevich, V. V. Glushchenko, V. N. Konchalenko, and D. L. Vinogradov, Vestn. Nizhegorod. Univ. im. N. I. Lobachevskogo, Fiz. Tverd. Tela, No. 2, 131 (1998).
Author information
Authors and Affiliations
Additional information
__________
Translated from Fizika Tverdogo Tela, Vol. 46, No. 11, 2004, pp. 1960–1963.
Original Russian Text Copyright © 2004 by Tetelbaum, Mendeleva.
Rights and permissions
About this article
Cite this article
Tetelbaum, D.I., Mendeleva, Y.A. A mechanical model of amorphization under ion bombardment. Phys. Solid State 46, 2026–2029 (2004). https://doi.org/10.1134/1.1825544
Received:
Issue Date:
DOI: https://doi.org/10.1134/1.1825544