Abstract
The initial stages of the growth of cobalt disilicide (CoSi2) on a 2×1 reconstructed Si(100) surface in the presence of oxygen have been studied for the first time by method of high-resolution photoelectron spectroscopy. The evolution of the electron structure of the sample surface was traced in the course of silicon oxidation, cobalt deposition, and subsequent thermal annealing. It is established that cobalt atoms penetrate to the oxide-silicon interface even at room temperature. This phenomenon favors the formation of an epitaxial CoSi2 layer with improved morphology.
Similar content being viewed by others
References
J. R. Jimenez, L. J. Schowalter, L. M. Hsiung, et al., J. Vac. Sci. Technol. A 8, 3014 (1990).
C. W. T. Bulle-Lieuwma, A. H. van Ommen, J. Hornstra, and C. N. A. M. Aussems, J. Appl. Phys. 71, 2211 (1992).
M. V. Gomoyunova, I. I. Pronin, D. A. Valdaitsev, et al., Phys. Low-Dimens. Semicond. Struct. 3/4, 163 (2002).
T. R. Tung, Appl. Phys. Lett. 68, 3461 (1996).
T. R. Tung, Jpn. J. Appl. Phys. 36, Part 1, 1650 (1997).
Y. Hayashi, M. Yoshinaga, H. Ikeda, et al., Surf. Sci. 438, 116 (1999).
A. Ishizaka and Y. Shiraki, J. Electrochem. Soc. 133, 666 (1986).
E. Landemark, C. J. Karlsson, Y.-C. Chao, and R. I. G. Uhrberg, Phys. Rev. Lett. 69, 1588 (1992).
T.-W. Pi, I.-H. Hong, C.-P. Cheng, et al., J. Electron Spectrosc. Relat. Phenom. 107, 163 (2000).
H. Koh, J. W. Kim, W. H. Choi, and H. W. Yeom, Phys. Rev. B 67, 073306 (2003).
M. V. Gomoyunova, I. I. Pronin, N. R. Gall, et al., Pis’ma Zh. Tekh. Fiz. 29(12), 25 (2003) [Tech. Phys. Lett. 29, 496 (2003)].
G. Hollinger and F. J. Himpsel, Phys. Rev. B 28, 3651 (1983).
Y. Hoshino, T. Nishimura, T. Nakada, et al., Surf. Sci. 488, 249 (2001).
P. Morgen, T. Jensen, C. Gundlach, et al., Comput. Mater. Sci. 21, 481 (2001).
J. M. Gallego, R. Miranda, S. Molodtsov, et al., Surf. Sci. 239, 203 (1990).
G. Rangelov, P. Augustin, J. Stober, et al., Phys. Rev. B 49, 7535 (1994).
G. Rangelov and Th. Fauster, Surf. Sci. 365, 403 (1996).
M. V. Gomoyunova, I. I. Pronin, N. R. Gall, et al., Fiz. Tverd. Tela (St. Petersburg) 45, 1519 (2003) [Phys. Solid State 45, 1596 (2003)].
H. W. Yeom, H. Hamamatsu, T. Ohta, and R. I. G. Uhrberg, Phys. Rev. B 59, R10413 (1999).
F. Takahashi, T. Irie, J. Shi, et al., Appl. Surf. Sci. 169, 315 (2001).
Author information
Authors and Affiliations
Additional information
__________
Translated from Pis’ma v Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 30, No. 20, 2004, pp. 17–24.
Original Russian Text Copyright © 2004 by Gomoyunova, Pronin, Gall, Molodtsov, Vyalikh.
Rights and permissions
About this article
Cite this article
Gomoyunova, M.V., Pronin, I.I., Gall, N.R. et al. The interaction of cobalt with oxidized silicon surface. Tech. Phys. Lett. 30, 850–853 (2004). https://doi.org/10.1134/1.1813729
Received:
Issue Date:
DOI: https://doi.org/10.1134/1.1813729