Skip to main content
Log in

Reversible changes in the microhardness of silicon crystals under electron irradiation with low doses

  • Defects, Dislocations, and Physics of Strength
  • Published:
Physics of the Solid State Aims and scope Submit manuscript

Abstract

Reversible softening of silicon single crystals under β irradiation with low doses (D<1 cGy) is revealed. The peaks observed in the dependence of the microhardness of silicon on the fluence are explained by the multistage competing processes of transformations of radiation-induced defects.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. V. S. Vavilov, Effects of Radiation on Semiconductors (Fizmatgiz, Moscow, 1963; Consultants Bureau, New York, 1965).

    Google Scholar 

  2. V. V. Kozlovskii, V. A. Kozlov, and V. N. Lomasov, Fiz. Tekh. Poluprovodn. (St. Petersburg) 34(2), 129 (2000) [Semiconductors 34, 123 (2000)].

    Google Scholar 

  3. V. A. Kozlov and V. V. Kozlovskii, Fiz. Tekh. Poluprovodn. (St. Petersburg) 35(7), 769 (2001) [Semiconductors 35, 735 (2001)].

    Google Scholar 

  4. V. A. Makara and N. N. Novikov, Fiz. Khim. Obrab. Mater., No. 6, 137 (1973).

  5. S. Fujita, K. Maeda, and S. Hyodo, Phys. Status Solidi A 109, 383 (1988).

    Google Scholar 

  6. Yu. I. Golovin, A. A. Dmitrievskii, R. K. Nikolaev, and I. A. Pushnin, Dokl. Akad. Nauk 385(1), 1 (2002) [Dokl. Phys. 47, 485 (2002)].

    Google Scholar 

  7. A. G. Lipson, D. M. Sakov, V. I. Savenko, and E. I. Saunin, Pis’ma Zh. Éksp. Teor. Fiz. 70(2), 118 (1999) [JETP Lett. 70, 123 (1999)].

    Google Scholar 

  8. Yu. I. Golovin, A. A. Dmitrievskii, R. K. Nikolaev, and I. A. Pushnin, Fiz. Tverd. Tela (St. Petersburg) 45(1), 187 (2003) [Phys. Solid State 45, 197 (2003)].

    Google Scholar 

  9. G. Golan, E. Rabinovich, A. Inberg, A. Axelevitch, M. Oksman, Y. Rosenwaks, A. Kozlovsky, P. G. Rancoita, M. Rattaggi, A. Seidman, and N. Croitoru, Microelectron. Reliab. 39, 1497 (1999).

    Google Scholar 

  10. B. Ya. Farber, V. I. Orlov, V. I. Nikitenko, and A. H. Heuer, Philos. Mag. A 78, 671 (1998).

    Google Scholar 

  11. Yu. I. Golovin, A. I. Tyurin, and B. Ya. Farber, Philos. Mag. A 82(10), 1857 (2002).

    Google Scholar 

  12. E. M. Verbitskaya, V. K. Eremin, A. M. Ivanov, Z. Li, and B. Schmidt, Fiz. Tekh. Poluprovodn. (St. Petersburg) 31(2), 235 (1997) [Semiconductors 31, 127 (1997)].

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Additional information

__________

Translated from Fizika Tverdogo Tela, Vol. 46, No. 10, 2004, pp. 1790–1792.

Original Russian Text Copyright © 2004 by Golovin, Dmitrievski\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \), Pushnin, Suchkova.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Golovin, Y.I., Dmitrievskii, A.A., Pushnin, I.A. et al. Reversible changes in the microhardness of silicon crystals under electron irradiation with low doses. Phys. Solid State 46, 1851–1853 (2004). https://doi.org/10.1134/1.1809418

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1134/1.1809418

Keywords

Navigation