Abstract
A method is proposed for measuring the probabilities of the heterogeneous loss of radicals in a gasdischarge plasma. The method is based on the time-resolved modulation actinometry. It is shown that this method is applicable for O, H, F, and CF2 radicals. The probabilities of the loss of these radicals on the discharge tube wall are measured in a dc glow discharge. It is shown that the measurement results do not depend on which radical’s emission line is used. The measurement results are only slightly affected by the dissociative excitation of the radical’s emitting states and the background emission from the plasma. It is shown that the technique proposed is similar to the method of laser-induced fluorescence and provides a fairly high accuracy when measuring the probabilities (up to γ R∼10−2–10−1) of the surface loss of radicals in a gas-discharge plasma. In contrast to the LIF method, this technique allows one to acquire a large amount of experimental data over a reasonable time interval (up to one thousand of γ R measurements per hour). This feature is an important and necessary condition for a thorough study of the surface reactions and the complicated many-parametrical mechanism for the heterogeneous loss of radicals.
Similar content being viewed by others
References
D. P. Woodruff and T. A. Delchar, Modern Techniques of Surface Science (Cambridge Univ. Press, 1986; Mir, Moscow, 1989).
J. Amorim, G. Baravian, and J. Jolly, J. Phys. D 33, R51 (2000).
H. F. Dobele, U. Czarnetzki, and A. Goehlich, Plasma Sources Sci. Technol. 9, 477 (2000).
M. D. Wheeler, S. M. Newman, A. J. Orr-Ewing, and M. N. R. Ashfold, J. Chem. Soc., Faraday Trans. 94, 337 (1998).
M. Haverlag, E. Stoffels, W. W. Stoffels, et al., Sci. Technol. A 12, 3102 (1994).
V. V. Ivanov, K. S. Klopovskii, D. V. Lopaev, et al., Fiz. Plazmy 26, 1046 (2000) [Plasma Phys. Rep. 26, 980 (2000)].
V. V. Ivanov, K. S. Klopovskii, D. V. Lopaev, et al., Fiz. Plazmy 26, 1038 (2000) [Plasma Phys. Rep. 26, 972 (2000)].
D. Pagnon, J. Amorim, J. Nahorny, et al., J. Phys. D 28, 1856 (1995).
V. V. Ivanov, K. S. Klopovskiy, D. V. Lopaev, et al., IEEE Trans. Plasma Sci. 27, 1279 (1999).
V. A. Feoktistov, V. V. Ivanov, A. M. Popov, et al., J. Phys. D 30, 423 (1997).
Y. C. Kimm and M. Boudart, Langmuir 7, 2999 (1991).
L. Magne, H. Coitout, G. Cernogora, and G. Gousset, J. Phys. III France 3, 1871 (1993).
G. Cartry, L. Magne, and G. Cernogora, J. Phys. D 32, L53 (1999).
G. Cartry, L. Magne, and G. Cernogora, J. Phys. D 33, 1303 (2000).
A. Rousseau, G. Cartry, and X. Duten, J. Appl. Phys. 89, 2074 (2001).
J. Amorim, J. Loureiro, G. Baravian, and M. Touzeau, J. Appl. Phys. 82, 2795 (1997).
A. D. Tserepi and T. A. Miller, J. Appl. Phys. 75, 7231 (1994).
B. Gordiets, C. M. Ferrera, M. J. Pinheiro, and A. Ricard, Plasma Sources Sci. Technol. 7, 379 (1998).
C. M. Ferreira, E. Tatarova, V. Guerra, et al., in Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures, Ed. by V. N. Ochkin (SPIE, Washington, 2002), p. 99.
J. Henriques, E. Tatarova, F. M. Dias, and C. M. Ferreira, J. Appl. Phys. 91, 5632 (2002).
J. Luque, E. A. Hudson, and J.-P. Booth, J. Chem. Phys. 118, 622 (2003).
J. Luque, E. A. Hudson, J.-P. Booth, and I. D. Petsalakis, J. Chem. Phys. 118, 1206 (2003).
M. Suto and N. Washida, J. Chem. Phys. 78, 1007 (1983).
M. Suto and N. Washida, J. Chem. Phys. 78, 1012 (1983).
M. Suto, M. Washida, H. Akimoto, and M. Nakamura, J. Chem. Phys. 78, 1019 (1983).
N. Washida, M. Suto, S. Nagase, et al., J. Chem. Phys. 78, 1025 (1983).
C. Larrieu, M. Chaillet, and A. Dargelos, J. Chem. Phys. 96, 3732 (1992).
S. Koda, Chem. Phys. Lett. 55, 353 (1978).
Z.-L. Cai, J. Phys. Chem. 97, 8399 (1993).
Q.-T. Trung, G. Durocher, P. Sauvagear, and C. Sandorfy, Chem. Phys. Lett. 47, 404 (1977).
V. V. Ivanov, K. S. Klopovskii, D. V. Lopaev, et al., Fiz. Plazmy 28, 257 (2002) [Plasma Phys. Rep. 28, 229 (2002)].
V. V. Ivanov, K. S. Klopovskii, D. V. Lopaev, et al., Fiz. Plazmy 28, 272 (2002) [Plasma Phys. Rep. 28, 243 (2002)].
A. D. Tserepi, J. Derouard, J.-P. Booth, and N. Sadeghi, J. Appl. Phys. 81, 2124 (1997).
T. Arai, M. Goto, K. Horikoshi, et al., Jpn. J. Appl. Phys. 38, 4377 (1999).
C. Suzuki, K. Sasaki, and K. Kadota, Jpn. J. Appl. Phys. 36, L824 (1997).
Author information
Authors and Affiliations
Additional information
__________
Translated from Fizika Plazmy, Vol. 30, No. 10, 2004, pp. 948–960.
Original Russian Text Copyright © 2004 by Lopaev, Smirnov.
Rights and permissions
About this article
Cite this article
Lopaev, D.V., Smirnov, A.V. Diagnostics of heterogeneous processes with the participation of radicals by time-resolved actinometry. Plasma Phys. Rep. 30, 882–893 (2004). https://doi.org/10.1134/1.1809405
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1134/1.1809405