Abstract
Parameters and ion-emission characteristics of the plasma generated in the anode stage of an ion source with a hollow glow-discharge plasma cathode are studied. To decrease the minimum operating gas pressure to 5×103 Pa, a multipole magnetic system was installed on the surface of the hollow cathode and the peripheral magnetic field was enhanced in the anode stage of the source. The effect of the gas pressure, the plasma-cathode current, and the voltage between the electrodes of the anode stage on the value of the ion current extracted from the plasma is investigated. It is found that the size of the exit aperture of the hollow cathode substantially affects the efficiency of ion extraction. The potential (1–5 V) and the electron temperature (1–8 eV) of the anode-stage plasma are measured by the probe method. The conditions are determined that ensure the maximum ion-emission current from the plasma at low gas pressures.
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Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 74, No. 9, 2004, pp. 97–102.
Original Russian Text Copyright © 2004 by Gavrilov, Kamenetskikh.
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Gavrilov, N.V., Kamenetskikh, A.S. Characteristics of an ion source with a plasma cathode and a multipole magnetic system for confining fast electrons. Tech. Phys. 49, 1202–1207 (2004). https://doi.org/10.1134/1.1800243
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DOI: https://doi.org/10.1134/1.1800243