Abstract
A new method is proposed for determining chlorine traces in monolayer films adsorbed on solid substrates. The method is based on secondary-ion mass spectrometry (SIMS) with the formation of positive chlorine-containing molecular ions. In contrast to the traditional method making use of inert gases, the secondary ions are generated by bombarding the chlorine-containing substrate with a beam of methane molecules. This leads to the formation of CCl +2 ions with molecular masses of 82, 84, and 85 amu. These peaks are reliably observed in the form of a doublet not masked by the peaks of ions of the substrate material and the other background reaction products.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
A. A. Sysoev, V. B. Artaev, and V. V. Kashcheev, Isotope Mass Spectroscopy, Ed. by A. A. Sysoev (Énergoatomizdat, Moscow, 1993).
S. Ferrari, G. Scarel, C. Wiemer, and M. Fanciulli, J. Appl. Phys. 92, 7675 (2002).
A. Godon, J. Webster, G. Layne, et al., Geophys. Res. Abstr. Eur. Geophys. Soc. 5, 13080 (2003).
G. C. Allen, I. T. Brown, E. Ciliberto, et al., Eur. J. Mass. Spectrom. 1, 493 (1995).
V. D. Frolov, V. I. Konov, S. M. Pimenov, et al., Appl. Phys. A 78, 21 (2004).
Author information
Authors and Affiliations
Additional information
__________
Translated from Pis’ma v Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 30, No. 15, 2004, pp. 15–18.
Original Russian Text Copyright © 2004 by Frolov, Apresyan, Vlasov, Krikunov, Vlasova.
Rights and permissions
About this article
Cite this article
Frolov, V.D., Apresyan, L.A., Vlasov, D.V. et al. Mass spectrometry of chlorine monolayers on solid substrates. Tech. Phys. Lett. 30, 626–627 (2004). https://doi.org/10.1134/1.1792293
Received:
Issue Date:
DOI: https://doi.org/10.1134/1.1792293