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Determining parameters of a multilayer heterostructure by joint analysis of the X-ray rocking curves measured for various crystallographic planes

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Abstract

The X-ray rocking curves of (004), (113), and (115) planes of a pseudomorphous InxGa1−x As/GaAs(001) heterostructure with a single 12-nm-thick quantum well were measured by double-crystal X-ray diffractometry. The joint fitting of the X-ray diffraction curves for various crystallographic planes has been performed for the first time, which provides more reliable information about the thickness, deformation, and amorphization of layers in the heterostructure studied.

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Authors and Affiliations

  1. Shubnikov Institute of Crystallography, Russian Academy of Sciences, Moscow, 117333, Russia

    A. A. Lomov & G. V. Ganin

  2. Institute of Physics and Technology, Russian Academy of Sciences, Moscow, Russia

    M. A. Chuev

Authors
  1. A. A. Lomov
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  2. M. A. Chuev
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  3. G. V. Ganin
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Translated from Pis’ma v Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \)Fiziki, Vol. 30, No. 10, 2004, pp. 89–95.

Original Russian Text Copyright © 2004 by Lomov, Chuev, Ganin.

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Lomov, A.A., Chuev, M.A. & Ganin, G.V. Determining parameters of a multilayer heterostructure by joint analysis of the X-ray rocking curves measured for various crystallographic planes. Tech. Phys. Lett. 30, 441–443 (2004). https://doi.org/10.1134/1.1760880

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  • DOI: https://doi.org/10.1134/1.1760880

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