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Differential low-coherence interferometry for in situ diagnostics of transparent structures

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Abstract

We describe and demonstrate a new differential method capable of measuring the profiles of transparent structures. Based on fiber-optic low-coherence interferometry and possessing a high noise immunity, the proposed technique can be used for the noncontact in situ diagnostics of microstructures under extremal conditions.

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Authors and Affiliations

  1. Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhni Novgorod, Russia

    V. V. Ivanov, V. A. Markelov, M. A. Novikov & S. S. Ustavshchikov

Authors
  1. V. V. Ivanov
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  2. V. A. Markelov
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  3. M. A. Novikov
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  4. S. S. Ustavshchikov
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Translated from Pis’ma v Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 30, No. 9, 2004, pp. 82–87.

Original Russian Text Copyright © 2004 by Ivanov, Markelov, Novikov, Ustavshchikov.

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Ivanov, V.V., Markelov, V.A., Novikov, M.A. et al. Differential low-coherence interferometry for in situ diagnostics of transparent structures. Tech. Phys. Lett. 30, 389–391 (2004). https://doi.org/10.1134/1.1760864

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  • DOI: https://doi.org/10.1134/1.1760864

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