Abstract
A theory is developed that makes it possible to calculate RF power absorption in an inductive plasma source. Conditions are determined under which most of the power is deposited in the plasma. It is shown that these conditions correspond to the excitation of spatial waves (an oblique Langmuir wave and a helicon wave). A simple self-consistent model of a plasma source is proposed that describes all of the experimentally observed distinctive properties of plasma sources well.
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References
A. F. Aleksandrov, G. É. Bugrov, N. F. Vorob'ev, et al., Prikl. Fiz., No. 1, 3 (1995).
K. P. Shamrai, A. F. Alexandrov, G. E. Bougrov, et al., in Proceedings of the 23rd International Conference on Phenomena in Ionic Gases, Toulouse, 1997; J. Phys. (France), Suppl. 3, 4365 (1997).
A. F. Alexandrov, E. A. Kralkina, V. A. Obukhov, et al., J. Mosc. Phys. Soc. 6(1), 113 (1996).
A. F. Alexandrov, G. E. Bugrov, E. A. Kralkina, et al., in Proceedings of the 25th International Conference on Phenomena in Ionic Gases, Nagoya, 2001.
R. W. Boswell, Plasma Phys. Controlled Fusion 26, 1147 (1984).
F. F. Chen, Introduction to Plasma Physics and Controlled Fusion, Vol. 1: Plasma Physics (Plenum Press, New York, 1984).
F. F. Chen and G. Chevalier, J. Vac. Sci. Technol. A 10, 1389 (1992).
F. F. Chen and D. Amush, Plasma Phys. 4, 3411 (1997).
J. Rayner and A. Cheetham, Plasma Sources Sci. Technol. 8, 79 (1999).
V. L. Ginzburg and A. A. Rukhadze, Waves in Magnetized Plasmas (Nauka, Moscow, 1970).
A. F. Aleksandrov, L. S. Bogdankevich, and A. A. Rukhadze, Principles of Plasma Electrodynamics (Vysshaya Shkola, Moscow, 1988; Springer-Verlag, Berlin, 1984).
A. Muller, E. Salzborn, R. Frodl, et al., J. Phys. B 13, 1877 (1980).
F. J. de Heer, R. H. J. Jansen, W. van der Kaay, et al., J. Phys. B 12, 979 (1979).
M. Light, F. F. Chen, and P. L. Colestock, Plasma Sources Sci. Technol. 11, 273 (2002).
Y. Sakawa, T. Takino, and T. Shoji, Phys. Plasmas 6, 4759 (1999).
K. R. Shamrai and V. B. Taranov, Plasma Sources Sci. Technol. 5, 474 (1999).
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Translated from Fizika Plazmy, Vol. 30, No. 5, 2004, pp. 434–449.
Original Russian Text Copyright © 2004 by Aleksandrov, Bugrov, Vavilin, Kerimova, Kondranin, Kral'kina, Pavlov, Plaksin, Rukhadze.
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Aleksandrov, A.F., Bugrov, G.É., Vavilin, K.V. et al. Self-consistent model of an inductive RF plasma source in an external magnetic field. Plasma Phys. Rep. 30, 398–412 (2004). https://doi.org/10.1134/1.1744949
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DOI: https://doi.org/10.1134/1.1744949