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Investigation of diffraction gratings with the use of a differential heterodyne microscope

  • Geometrical and Applied Optics
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Abstract

A theory of image formation in a scanning differential heterodyne microscope is developed using the results of observations of a metallized periodic structure with a rectangular profile. The phase and amplitude response functions are calculated for TE and TM polarizations. It is demonstrated that the width of grating elements can be measured with a superresolution. The experimental phase and amplitude responses from a metallized grating with a trapezoidal profile are obtained and compared with the results of theoretical calculations.

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Authors and Affiliations

  1. General Physics Institute, Russian Academy of Sciences, Moscow, 119991, Russia

    I. M. Akhmedzhanov, D. V. Baranov & E. M. Zolotov

Authors
  1. I. M. Akhmedzhanov
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  2. D. V. Baranov
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  3. E. M. Zolotov
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Correspondence to E. M. Zolotov.

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__________

Translated from Optika i Spektroskopiya, Vol. 96, No. 4, 2004, pp. 697–703.

Original Russian Text Copyright © 2004 by Akhmedzhanov, Baranov, Zolotov.

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Akhmedzhanov, I.M., Baranov, D.V. & Zolotov, E.M. Investigation of diffraction gratings with the use of a differential heterodyne microscope. Opt. Spectrosc. 96, 635–640 (2004). https://doi.org/10.1134/1.1719156

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  • DOI: https://doi.org/10.1134/1.1719156

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