Abstract
Different techniques for the fabrication of structures containing ensembles of ultrasmall germanium nanoclusters distributed with a high density over the substrate surface are discussed. How to control the morphology and ordering of these ensembles is also discussed.
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Translated from Fizika Tverdogo Tela, Vol. 46, No. 1, 2004, pp. 67–69.
Original Russian Text Copyright © 2004 by Bolkhovityanov, Krivoshchapov, Nikiforov, Ol’shanetski\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \), Pchelyakov, Sokolov, Teys.
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Bolkhovityanov, Y.B., Krivoshchapov, S.T., Nikiforov, A.I. et al. Synthesis of ordered Ge-Si heterostructures containing ultrasmall germanium nanoclusters. Phys. Solid State 46, 64–66 (2004). https://doi.org/10.1134/1.1641922
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DOI: https://doi.org/10.1134/1.1641922