Skip to main content
SpringerLink
Log in

Contactless method for studying the parameters of the electrode region of an RF discharge

  • Plasma Diagnostics
  • Published:
Plasma Physics Reports Aims and scope Submit manuscript

Abstract

A nonintrusive contactless method for studying the parameters of the electrode region of a capacitive low-pressure RF discharge is proposed. The method involves the measurements of dc and ac electric voltages at the elements of the discharge circuit with subsequent calculations of both the electrostatic potential drop across the electrode sheath and the sheath thickness by using relations derived in the paper. For a collisionless electrode sheath, the density of the positive-ion current onto the electrode and the charge density at the plasma boundary are determined. It is shown experimentally that the method can be successfully applied to studying capacitive RF discharges with inner or outer electrodes.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. A. F. Aleksandrov, Zh. Tekh. Fiz. 35, 35 (1965) [Sov. Phys. Tech. Phys. 10, 24 (1965)].

    Google Scholar 

  2. E. Appleton and F. Childs, Philos. Mag. 10, 969 (1930).

    Google Scholar 

  3. A. F. Aleksandrov and A. A. Kuzovnikov, Izv. Vyssh. Uchebn. Zaved., Radiofiz. 11, 1548 (1968).

    Google Scholar 

  4. V. L. Kovalevskii and V. P. Savinov, Fiz. Plazmy 20, 322 (1994) [Plasma Phys. Rep. 20, 292 (1994)].

    Google Scholar 

  5. V. P. Savinov and V. G. Yakunin, in Proceedings of the 19th International Conference on Phenomena in Ionized Gases, Belgrad, 1989, p. 220.

  6. Yu. P. Raizer, Gas Discharge Physics (Springer-Verlag, Berlin, 1991; Nauka, Moscow, 1992).

    Google Scholar 

  7. A. A. Kuzovnikov and V. P. Savinov, Vestn. Mosk. Gos. Univ., Ser. 3: Fiz., Astron., No. 2, 215 (1973).

  8. H. Butler and G. Kino, Phys. Fluids 6, 1346 (1963).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Moscow State University, Vorob'evy gory, Moscow, 119899, Russia

    A. F. Aleksandrov, V. A. Ryaby, V. P. Savinov & V. G. Yakunin

Authors
  1. A. F. Aleksandrov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. V. A. Ryaby
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. V. P. Savinov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. V. G. Yakunin
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

__________

Translated from Fizika Plazmy, Vol. 28, No. 12, 2002, pp. 1086–1092.

Original Russian Text Copyright © 2002 by Aleksandrov, Ryaby, Savinov, Yakunin.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Aleksandrov, A.F., Ryaby, V.A., Savinov, V.P. et al. Contactless method for studying the parameters of the electrode region of an RF discharge. Plasma Phys. Rep. 28, 1001–1007 (2002). https://doi.org/10.1134/1.1528230

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1134/1.1528230

Keywords

Search

Navigation