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Features of defect formation on a deformed Si(111) surface

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Abstract

Dynamics of the surface relief on a Si(111) single crystal face of a sample subjected to biaxial lateral extension after mechanical or chemical polishing was studied using scanning tunneling microscopy. In both cases, despite certain differences, the sample surface shows evidence of relief dynamics on a nanometer scale and exhibits a fractal character of the spatial structure formed in late stages of the process.

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Authors and Affiliations

  1. Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russia

    V. I. Betekhtin, N. N. Gorobei, V. E. Korsukov, A. S. Luk’yanenko, B. A. Obidov & A. N. Tomilin

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  1. V. I. Betekhtin
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  2. N. N. Gorobei
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  3. V. E. Korsukov
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  4. A. S. Luk’yanenko
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  5. B. A. Obidov
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  6. A. N. Tomilin
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__________

Translated from Pis’ma v Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 28, No. 21, 2002, pp. 29–35.

Original Russian Text Copyright © 2002 by Betekhtin, Gorobe\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \), Korsukov, Luk’yanenko, Obidov, Tomilin.

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Betekhtin, V.I., Gorobei, N.N., Korsukov, V.E. et al. Features of defect formation on a deformed Si(111) surface. Tech. Phys. Lett. 28, 893–895 (2002). https://doi.org/10.1134/1.1526874

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  • DOI: https://doi.org/10.1134/1.1526874

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