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Repetitive low-pressure volume discharge induced by attachment instability in an Ar/Cl2 mixture

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Abstract

Ignition conditions and the characteristics of a repetitive volume discharge with a spherical anode and plane cathode are investigated. The discharge was ignited in Ar/Cl2 mixtures (P≤2.0 kPa) used in excimer halogen lamps operating on the ArCl (B-X) 175-nm, Cl2(D′-A′) 257-nm, and Cl **2 195-to 200-nm molecular bands. At an interelectrode distance of 3 cm and a dc anode voltage of U ch ≤1 kV, a stable repetitive pulsed discharge with a repetition rate of 1–50 kHz was ignited in chlorine or (0.1–2.0)/(0.04–0.12)-kPa Ar/Cl2 mixtures. The development of attachment instability in the discharge plasma, in which the processes of the formation, decay, and diffusion of the Cl −2 and Cl− negative ions play an important role, leads to the formation of a solitary pearlike plasma domain with an average diameter of 0.2–3.5 cm.

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  1. Uzhhorod National University, Uzhhorod, 88000, Ukraine

    A. K. Shuaibov

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  1. A. K. Shuaibov
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Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 72, No. 10, 2002, pp. 138–142.

Original Russian Text Copyright © 2002 by Shuaibov.

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Shuaibov, A.K. Repetitive low-pressure volume discharge induced by attachment instability in an Ar/Cl2 mixture. Tech. Phys. 47, 1341–1344 (2002). https://doi.org/10.1134/1.1514820

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