Abstract
The emission from the plasma of a contracted longitudinal dc discharge in a He/CF2Cl2 mixture in the wavelength range 130–300 nm is investigated. It is shown that the discharge plasma emits within the range 150–260 nm. The emission consists mainly of the broad bands of Cl2 molecules and single-charged chlorine ions. The pressure and composition of the working mixtures, the discharge current, and the time during which the emitter can operate on a single gas fill are optimized to attain the best characteristics of UV and VUV radiation. The results obtained are of interest for developing a steady-state source of VUV and UV radiation to be applied in microelectronics, photochemistry, and medicine.
Similar content being viewed by others
References
A. P. Golovitskii and S. V. Lebedev, Opt. Spektrosk. 82, 251 (1997) [Opt. Spectrosc. 82, 227 (1997)].
M. I. Lomaev, A. N. Panchenko, É. A. Sosnin, and V. F. Tarasenko, Zh. Tekh. Fiz. 68(2), 64 (1998) [Tech. Phys. 43, 192 (1998)].
A. K. Shuaibov, A. I. Dashchenko, and I. V. Shevera, Zh. Tekh. Fiz. 71(8), 121 (2001) [Tech. Phys. 46, 1049 (2001)].
A. K. Shuaibov, A. I. Dashchenko, and I. V. Shevera, Teplofiz. Vys. Temp. 39, 833 (2001).
A. K. Shuaibov, Zh. Tekh. Fiz. 70(10), 117 (2000) [Tech. Phys. 45, 1346 (2000)].
A. K. Shuaibov, L. L. Shimon, A. I. Dashchenko, and I. V. Shevera, Teplofiz. Vys. Temp. 38, 386 (2000).
V. I. Svettsov, A. L. Kupriyanovskaya, and A. B. Maryshev, Zh. Prikl. Spektrosk. 35, 205 (1981).
A. P. Golovitskii, Pis’ma Zh. Tekh. Fiz. 24(6), 63 (1998) [Tech. Phys. Lett. 24, 233 (1998)].
L. M. Vasilyak, S. V. Kostyuchenko, A. V. Krasnochub, and M. E. Kuz’menko, Zh. Prikl. Spektrosk. 65, 302 (1998).
Yu. I. Bychkov, S. L. Gorokhov, and A. G. Yastremskii, Kvantovaya Élektron. (Moscow) 30, 733 (2000).
A. A. Kudryavtsev, A. L. Kuranov, V. G. Mishakov, et al., Zh. Tekh. Fiz. 71(3), 29 (2001) [Tech. Phys. 46, 299 (2001)].
Yu. P. Raizer, Gas Discharge Physics (Nauka, Moscow, 1987; Springer-Verlag, Berlin, 1991).
Author information
Authors and Affiliations
Additional information
__________
Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l}\) Fiziki, Vol. 72, No. 4, 2002, pp. 32–35.
Original Russian Text Copyright © 2002 by Shuaibov, Dashchenko, Shevera.
Rights and permissions
About this article
Cite this article
Shuaibov, A.K., Dashchenko, A.I. & Shevera, I.V. Optical characteristics of the steady-state plasma of a longitudinal discharge in a He/CFC-12 mixture. Tech. Phys. 47, 406–409 (2002). https://doi.org/10.1134/1.1470585
Received:
Issue Date:
DOI: https://doi.org/10.1134/1.1470585