Skip to main content
Log in

Scanning calorimetry measurements of the energy parameters of a plasmochemical polymer oxidation reaction

  • Low-Temperature Plasma
  • Published:
Plasma Physics Reports Aims and scope Submit manuscript

Abstract

The contributions of heat fluxes of different nature to the total heat flux from a weakly ionized oxygen plasma of a low-pressure (20–120 Pa) RF discharge onto the calorimeter surface, on which a chemical reaction between atomic oxygen and a polymer proceeds, are distinguished. The activation energy (ΔE≈0.37 eV), the reaction heat (H≈27 kJ/g), and the rate constant for heat release in a surface plasmochemical reaction are determined.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. I. P. Herman, Optical Diagnostics for Thin Film Processing (Academic, San Diego, 1996).

    Google Scholar 

  2. A. N. Magunov, Pis’ma Zh. Tekh. Fiz. 21(5), 44 (1995) [Tech. Phys. Lett. 21, 185 (1995)].

    Google Scholar 

  3. A. N. Magunov, Prib. Tekh. Éksp., No. 5, 131 (1995).

  4. A. N. Magunov, Fiz. Plazmy 23, 1018 (1997) [Plasma Phys. Rep. 23, 940 (1997)].

    Google Scholar 

  5. A. N. Magunov, Prib. Tekh. Éksp., No. 1, 92 (1999).

  6. A. N. Magunov, A. Yu. Gasilov, and O. V. Lukin, Teplofiz. Vys. Temp. 37, 202 (1999).

    Google Scholar 

  7. W. M. Moreau, Semiconductor Lithography (Plenum, New York, 1988; Mir, Moscow, 1990).

    Google Scholar 

  8. A. N. Magunov and E. V. Mudrov, Teplofiz. Vys. Temp. 30, 372 (1992).

    Google Scholar 

  9. N. N. Semenov, Chain Reactions (Nauka, Moscow, 1986).

    Google Scholar 

  10. V. D. Berkut, V. M. Doroshenko, V. V. Kovtun, and N. N. Kudryavtsev, Nonequilibrium Physicochemical Processes in Hypersonic Aerodynamics (Énergoatomizdat, Moscow, 1994).

    Google Scholar 

  11. A. N. Magunov, Fiz. Plazmy 27, 378 (2001) [Plasma Phys. Rep. 27, 355 (2001)].

    Google Scholar 

  12. A. N. Magunov, Pis’ma Zh. Tekh. Fiz. 20(7), 65 (1994) [Tech. Phys. Lett. 20, 289 (1994)].

    Google Scholar 

  13. Concise Handbook of Physicochemical Quantities, Ed. by A. A. Ravdel’ and A. M. Ponomareva (Khimiya, Leningrad, 1983).

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Additional information

__________

Translated from Fizika Plazmy, Vol. 28, No. 4, 2002, pp. 392–400.

Original Russian Text Copyright © 2002 by Magunov.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Magunov, A.N. Scanning calorimetry measurements of the energy parameters of a plasmochemical polymer oxidation reaction. Plasma Phys. Rep. 28, 359–366 (2002). https://doi.org/10.1134/1.1469177

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1134/1.1469177

Keywords

Navigation