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Achromatic deflectors with combined electrodes and poles

  • Electron and Ion Beams, Accelerators
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Abstract

A combined electromagnetic deflector consisting of four or eight electrodes that simultaneously act as poles is proposed. The distribution of the potential in such systems is obtained, and the parameters of the base beam trajectory under achromatic operating conditions are calculated. New (nonclassic) relationships between the electrostatic and magnetic components of the field that provide a lower residual chromatic aberration and a higher deflection linearity are found.

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Authors and Affiliations

  1. Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politechnicheskaya ul. 26, St. Petersburg, 194021, Russia

    L. P. Ovsyannikova & T. Ya. Fishkova

  2. Applied Materials, GEM Business Unit, 74103, Nes-Ziona, Israel

    I. A. Petrov

Authors
  1. L. P. Ovsyannikova
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  2. T. Ya. Fishkova
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  3. I. A. Petrov
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__________

Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 71, No. 12, 2001, pp. 62–65.

Original Russian Text Copyright © 2001 by Ovsyannikova, Fishkova, Petrov.

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Ovsyannikova, L.P., Fishkova, T.Y. & Petrov, I.A. Achromatic deflectors with combined electrodes and poles. Tech. Phys. 46, 1549–1552 (2001). https://doi.org/10.1134/1.1427990

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  • DOI: https://doi.org/10.1134/1.1427990

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