Skip to main content
SpringerLink
Log in

The effect of ultraviolet irradiation on the properties of Zr/Si contacts

  • Gas Discharges, Plasma
  • Published:
Technical Physics Aims and scope Submit manuscript

Abstract

The effect of ultraviolet (UV) irradiation on the properties of Zr/Si contacts subjected to heat treatment is investigated. It is established that, due to variations in the phase composition of the contact, its electrophysical parameters are modified. The application of the combined treatment allows one to form Zr/Si contacts with specified properties.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. D. T. Alimov, V. K. Tyugai, P. K. Khabibulaev, et al., Zh. Fiz. Khim. 61, 3065 (1987).

    Google Scholar 

  2. A. M. Chaplanov and A. N. Shibko, Kvantovaya Élektron. (Moscow) 20, 191 (1993).

    Google Scholar 

  3. A. M. Chaplanov and A. N. Shibko, Izv. Akad. Nauk SSSR, Ser. Fiz. 53, 1111 (1989).

    Google Scholar 

  4. Handbook of Thin-Film Technology, Ed. by L. I. Maissel and R. Glang (McGraw-Hill, New York, 1970; Sov. Radio, Moscow, 1977), Vol. 1.

    Google Scholar 

  5. E. H. Rhoderick, Metal-Semiconductor Contacts (Claredon, Oxford, 1978; Radio i Svyaz’, Moscow, 1982).

    Google Scholar 

  6. J. G. Calvert and J. N. Pitts, Jr., Photochemistry (Wiley, New York, 1966; Mir, Moscow, 1968).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of Electronics, Belarussian Academy of Sciences, Minsk, 220841, Belarus

    I. S. Nuprienok & A. N. Shibko

Authors
  1. I. S. Nuprienok
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. N. Shibko
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

__________

Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 71, No. 9, 2001, pp. 45–48.

Original Russian Text Copyright © 2001 by Nuprienok, Shibko.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Nuprienok, I.S., Shibko, A.N. The effect of ultraviolet irradiation on the properties of Zr/Si contacts. Tech. Phys. 46, 1112–1115 (2001). https://doi.org/10.1134/1.1404161

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1134/1.1404161

Keywords

Search

Navigation