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The effect of He+, O+, B+, and Cd+ implantation on the surface structure of magnesium oxide substrates for HTSC films

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Abstract

The surface structure and the morphology of polished MgO(100) substrates after ion implantation and laser annealing are studied. It is shown that ion implantation, combined with subsequent laser annealing, modifies the surface of the MgO(100) substrate, producing a single-crystal surface layer. According to electron diffraction analysis data, this layer is continuous only in case of Cd+ implantation.

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Authors and Affiliations

  1. Domen Research Institute, St. Petersburg, 196084, Russia

    Yu. M. Yakovlev, G. A. Nikolaichuk, N. M. Shibanova, T. A. Krylova, L. A. Kalyuzhnaya & V. V. Petukhova

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  1. Yu. M. Yakovlev
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  2. G. A. Nikolaichuk
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  3. N. M. Shibanova
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  4. T. A. Krylova
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  5. L. A. Kalyuzhnaya
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  6. V. V. Petukhova
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Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 71, No. 8, 2001, pp. 117–120.

Original Russian Text Copyright © 2001 by Yakovlev, Nikola\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \)chuk, Shibanova, Krylova, Kalyuzhnaya, Petukhova.

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Yakovlev, Y.M., Nikolaichuk, G.A., Shibanova, N.M. et al. The effect of He+, O+, B+, and Cd+ implantation on the surface structure of magnesium oxide substrates for HTSC films. Tech. Phys. 46, 1045–1048 (2001). https://doi.org/10.1134/1.1395128

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  • DOI: https://doi.org/10.1134/1.1395128

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