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Some features of the ion-beam mixing during simultaneous ion implantation and metal deposition

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Abstract

Experimental results on the ion implantation of Ta and Cu ions into an Al substrate, accompanied by the deposition of these ions in the form of a surface coating are reported. The coatings composed of the implant elements exhibit a complicated structure and lead to an increase in the microhardness, adhesion properties, and corrosion resistance of the substrate. An analysis of data on the energy distribution of secondary ions shows that the surface layer of ion-implanted substrates contains intermetallic phases.

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Authors and Affiliations

  1. Institute of Surface Modification, Sumy, Ukraine

    A. D. Pogrebnyak, V. A. Martynenko, A. D. Mikhalev, V. T. Shablya & V. P. Yanovskii

Authors
  1. A. D. Pogrebnyak
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  2. V. A. Martynenko
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  3. A. D. Mikhalev
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  4. V. T. Shablya
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  5. V. P. Yanovskii
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__________

Translated from Pis’ma v Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 27, No. 14, 2001, pp. 88–94.

Original Russian Text Copyright © 2001 by Pogrebnyak, Martynenko, Mikhalev, Shablya, Yanovski\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \).

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Pogrebnyak, A.D., Martynenko, V.A., Mikhalev, A.D. et al. Some features of the ion-beam mixing during simultaneous ion implantation and metal deposition. Tech. Phys. Lett. 27, 615–617 (2001). https://doi.org/10.1134/1.1388962

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  • DOI: https://doi.org/10.1134/1.1388962

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