Abstract
Metal-nanoparticle-containing composite layers were synthesized by implantation of 60 keV Ag+ ions into a soda-lime silicate glass to a dose of 3×1016 ion/cm2 at an ion beam current density of 3 μA/cm2 and a substrate temperature of 35°C. The results of implantation depend on the temperature effects developed in the glass targets of various thicknesses. Data on the silver distribution profile and the nucleation and growth of metal nanoparticles in depth of the implanted layers were obtained from the optical reflection spectra. It is demonstrated that even small variations in the surface temperature of the ion-bombarded glass substrate lead to significant changes in the conditions of nanoparticle formation in the sample.
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Translated from Pis’ma v Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 27, No. 13, 2001, pp. 57–63.
Original Russian Text Copyright © 2001 by Stepanov, Hole, Popok.
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Stepanov, A.L., Hole, D. & Popok, V.N. Effect of the target surface temperature on the distribution of nanoparticles formed by ion implantation. Tech. Phys. Lett. 27, 554–556 (2001). https://doi.org/10.1134/1.1388941
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DOI: https://doi.org/10.1134/1.1388941