Abstract
Self-organizing structures on the InP surface that are formed by ion-beam sputtering in the energy range 0.1–15 keV are investigated. It is shown that the processing of the InP surface by monochromatic argon beams can give rise to the formation of two, “grass” and “cone-in-pit,” morphologies. The formation of the relief is treated in terms of a qualitative model including the processes of sputtering, cascade mixing, and surface transport. The model adequately predicts the fluence dependence of the density and size of morphological features. In addition, it enables one to clarify conditions under which the morphologies form, as well as to explain the effect of target temperature on the demarcation line between the morphologies. It is demonstrated that the morphology may become anisotropic in the case of mask etching. In particular, the application of regularly spaced strips as masks makes it possible to produce a texture-like surface structure.
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References
J. Joannopoulos, R. Meade, and J. Winn, Photonic Crystals (Princeton Univ. Press, Princeton, 1995).
E. Yablonovitch, J. Mod. Opt. 41, 173 (1994).
J. B. Malherbe, Crit. Rev. Solid State Mater. Sci. 19(2/3), 55 (1994).
O. Wada, J. Phys. D 17, 2429 (1984).
I. P. Soshnikov, A. V. Lunev, M. E. Gaevski, et al., Proc. SPIE 3048, 404 (1997).
K. Sangwal, Etching of Crystals: Theory, Experiment, and Application (Elsevier, Amsterdam, 1987; Mir, Moscow, 1990).
I. P. Soshnikov, A. V. Lunev, Yu. A. Kudryavtsev, and N. A. Bert, Nucl. Instrum. Methods Phys. Res. B 59/60, 115 (1996).
I. P. Soshnikov and N. A. Bert, Fiz. Tverd. Tela (St. Petersburg) 35, 2250 (1993) [Phys. Solid State 35, 1118 (1993)].
I. P. Soshnikov and N. A. Bert, Zh. Tekh. Fiz. 66(6), 84 (1996) [Tech. Phys. 41, 567 (1996)].
J. Comas and C. B. Cooper, J. Appl. Phys. 38, 2956 (1967).
S. R. Bhattacharya, D. Ghose, and D. Basu, Nucl. Instrum. Methods Phys. Res. B 47, 253 (1990).
V. T. Barchenko and A. Sokolovskii, Izv. Leningr. Élektrotekh. Inst. im. V. I. Ul’yanova 303, 42 (1982).
Landolt-Börnstein, Numerical Data and Functional Relationships in Science and Technology (Springer-Verlag, Berlin, 1982), Vol. 17e.
O. M. Gorbenko, D. V. Kurochkin, and A. O. Golubok, in Proceedings of the 1st International Conference on Digital Signal Processing and Its Application, Moscow, 1998, Vol. 3, p. 197.
G. Carter, in Erosion and Growth of Solids Simulated by Atom and Ion Beams, Ed. by G. Kirikidis, G. Garter, and J. L. Whitton (Martinus Nijhoff Publ., Dordrecht, 1986).
M. G. Stepanova, in Proceedings of the 3rd International Conference on Computer Simulation of Radiation Effects in Solids, COSIRES’96, Univ. of Surrey, Guildford, 1996, Vol. 1, p. 85.
S. A. Kukushkin and V. V. Slezov, Disperse Systems on Solid Surface (Nauka, St. Petersburg, 1996).
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Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l}\) Fiziki, Vol. 71, No. 7, 2001, pp. 106–110.
Original Russian Text Copyright © 2001 by Soshnikov, Lunev, Gaevski\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l}\), Nesterov, Kulagina, Rotkina, Barchenko, Kalmykova, Efimov, Gorbenko.
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Soshnikov, I.P., Lunev, A.V., Gaevskii, M.É. et al. The formation of developed morphology on the indium phosphide surface by ion argon beam sputtering. Tech. Phys. 46, 892–896 (2001). https://doi.org/10.1134/1.1387553
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DOI: https://doi.org/10.1134/1.1387553