Skip to main content
Log in

Silicon nanocluster formation under electron-beam-induced modification of a silicate matrix

  • Low-Dimensional Systems and Surface Physics
  • Published:
Physics of the Solid State Aims and scope Submit manuscript

Abstract

A cathodoluminescence band in the green spectral region is observed in silicate matrices when the excitation density exceeds a certain threshold value. This band is due to the formation of silicon nanoclusters 4–5 nm in size and becomes manifest at SiO2/Si interfaces when impurities are introduced into the silicate matrix, as well as under electron-beam irradiation.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. M. V. Zamoryanskaya and V. I. Sokolov, Fiz. Tverd. Tela (St. Petersburg) 40, 1984 (1998) [Phys. Solid State 40, 1797 (1998)].

    Google Scholar 

  2. M. V. Zamoryanskaya, V. I. Sokolov, A. A. Sitnikova, and C. G. Konnikov, Solid State Phenom. 63–64, 237 (1998).

    Google Scholar 

  3. L. N. Skuja and A. R. Silin, Phys. Status Solidi A 70, 43 (1982).

    Google Scholar 

  4. J. P. Mitchell and D. G. Denure, Solid-State Electron. 16, 825 (1973).

    Article  Google Scholar 

  5. S. A. Litvinenko and V. I. Sokolov, Phys. Status Solidi A 116, 615 (1989).

    Google Scholar 

  6. V. G. Baru, M. I. Elinson, V. A. Zhitov, et al., Mikroélektronika 27, 45 (1998).

    Google Scholar 

  7. V. N. Bogomolov, M. V. Zamoryanskaya, and V. I. Sokolov, RF Patent No. 215308.

  8. V. N. Bogomolov, Phys. Rev. B 51, 17040 (1995).

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Additional information

__________

Translated from Fizika Tverdogo Tela, Vol. 43, No. 2, 2001, pp. 357–359.

Original Russian Text Copyright © 2001 by Bogomolov, Gurevich, Zamoryanskaya, Sitnikova, Smirnova, Sokolov.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Bogomolov, V.N., Gurevich, S.A., Zamoryanskaya, M.V. et al. Silicon nanocluster formation under electron-beam-induced modification of a silicate matrix. Phys. Solid State 43, 373–376 (2001). https://doi.org/10.1134/1.1349490

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1134/1.1349490

Keywords

Navigation