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Stationary states of a low-pressure inductively coupled RF discharge near the quenching threshold

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Abstract

A refined self-consistent volume-averaged model of a low-pressure inductively coupled RF discharge is proposed. It is demonstrated that taking into account finite dimensions of the near-electrode space-charge region leads to a double-valued dependence of the equilibrium electron temperature on the discharge pressure and power. There is a critical power level, dependent on the pressure and working chamber geometry, below which no stationary inductively coupled discharge can exist in the system. The theoretical results show good agreement with experiment.

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Authors and Affiliations

  1. Kharkov State University, Kharkov, Ukraine

    A. V. Zykov & K. I. Polozhii

Authors
  1. A. V. Zykov
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  2. K. I. Polozhii
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Translated from Pis’ma v Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l}\) Fiziki, Vol. 26, No. 11, 2000, pp. 68–74.

Original Russian Text Copyright © 2000 by Zykov, Polozhi\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l}\).

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Zykov, A.V., Polozhii, K.I. Stationary states of a low-pressure inductively coupled RF discharge near the quenching threshold. Tech. Phys. Lett. 26, 481–484 (2000). https://doi.org/10.1134/1.1262884

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  • DOI: https://doi.org/10.1134/1.1262884

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