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Zinc oxide molecules and clusters formed in a quasiclosed volume of reactive gas-discharge plasma

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Abstract

Plasma-deposited zinc oxide films were studied and it was established that oxide molecules may form and their clusters nucleate within a recombination burning zone in the volume of plasma, provided that the ion range does not exceed the size of a discharge chamber. The nucleation zone is rather narrow and its position depends on the gas pressure in the chamber. The zinc oxide films grown in this zone possess a texture with small misorientation angle and are characterized by small thickness of the nucleation texture and high piezoelectric activity.

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References

  1. B. S. Danilin and V. K. Syrchin, Magnetron Sputtering Systems (Radio i Svyaz’, Moscow, 1982).

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  2. Handbook of Thin-Film Technology, Ed. by L. I. Maissel and R. Glang (McGraw-Hill, New York, 1970; Sov. Radio, Moscow, 1977), Vol. 2.

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Authors and Affiliations

  1. Saratov Department, Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Saratov, Russia

    E. I. Burylin, A. A. Veselov, A. G. Veselov, A. S. Dzhumaliev, S. N. Ivanov & O. A. Kiryasova

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  1. E. I. Burylin
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  2. A. A. Veselov
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  3. A. G. Veselov
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  4. A. S. Dzhumaliev
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  5. S. N. Ivanov
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  6. O. A. Kiryasova
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Translated from Pis’ma v Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 26, No. 7, 2000, pp. 31–34.

Original Russian Text Copyright © 2000 by Burylin, Veselov, Veselov, Dzhumaliev, Ivanov, Kiryasova.

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Burylin, E.I., Veselov, A.A., Veselov, A.G. et al. Zinc oxide molecules and clusters formed in a quasiclosed volume of reactive gas-discharge plasma. Tech. Phys. Lett. 26, 282–283 (2000). https://doi.org/10.1134/1.1262818

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  • DOI: https://doi.org/10.1134/1.1262818

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