Abstract
The high-energy part of the electron energy spectrum of the plasma of an asymmetric capacitive low-pressure rf discharge in air associated with electron beams near the electrodes is studied experimentally. It is found that the energy distributions obtained under different conditions contain a beam peak, both quasimonoenergetic and substantially broadened in energy. It is established on the basis of quantitative estimates that the substantial damping of the electron beam is due to the excitation of collisionally dissipative and collisionless beam-plasma instabilities.
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Pis’ma Zh. Tekh. Fiz. 25, 32–39 (October 12, 1999)
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Aleksandrov, A.F., Rukhadze, A.A., Savinov, V.P. et al. Electronic energy spectrum of the sheath of an asymmetric low-pressure capacitive rf discharge. Tech. Phys. Lett. 25, 772–774 (1999). https://doi.org/10.1134/1.1262630
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DOI: https://doi.org/10.1134/1.1262630