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Investigation of the degradation of silane molecules in a pulsed volume discharge

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Abstract

Results are presented of an investigation of the electrical and optical characteristics of a pulsed transverse discharge ignited in a 54×2.0×0.7 cm volume of an Ar+4%SiH4 mixture. Studies were made of general spectra of the plasma radiation and the temporal and service-life characteristics of the radiation from the degradation products of the silane molecules. This type of discharge is of interest for obtaining porous silicon coatings over large areas.

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Authors and Affiliations

  1. Uzhgorod State University, Uzhgorod

    A. K. Shuaibov, L. L. Shimon, A. I. Dashchenko & A. I. Minya

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  1. A. K. Shuaibov
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  2. L. L. Shimon
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  3. A. I. Dashchenko
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  4. A. I. Minya
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Additional information

Pis’ma Zh. Tekh. Fiz. 24, 35–39 (November 12, 1998)

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Shuaibov, A.K., Shimon, L.L., Dashchenko, A.I. et al. Investigation of the degradation of silane molecules in a pulsed volume discharge. Tech. Phys. Lett. 24, 844–845 (1998). https://doi.org/10.1134/1.1262287

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  • DOI: https://doi.org/10.1134/1.1262287

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