Abstract
A qualitative change was observed in the three-crystal x-ray spectra during fluorination of a Pt/LaF3/Si structure. This may be attributed to smoothing of the surface of the platinum film, most likely as a result of the formation of platinum tetrafluoride which may undergo partial volatilization or partial dissociation with the sublimation of platinum.
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Pis’ma Zh. Tekh. Fiz. 24, 31–34 (July 26, 1998)
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Nefedov, A.A., Sbitnev, S.E. & Fanchenko, S.S. Time evolution of three-crystal X-ray spectra during fluorination of a Pt/LaF3/Si structure. Tech. Phys. Lett. 24, 554–555 (1998). https://doi.org/10.1134/1.1262192
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DOI: https://doi.org/10.1134/1.1262192