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Influence of nitrogen on the optical and mechanical properties of diamond-like carbon films

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Abstract

Optical and mechanical properties of diamond-like carbon films grown by chemical vapor deposition were investigated as a function of the nitrogen content in the gas mixture. The nonmonotonic variation of the optical band gap and the microhardness of the films are interpreted using a model which allows for the influence of nitrogen on their structure. It is shown that nitrogen-containing diamond-like carbon films hold out promise as protective and antireflection coatings for silicon solar cells.

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Authors and Affiliations

  1. Institute of Semiconductor Physics, Ukrainian National Academy of Sciences, Kiev

    N. I. Klyui

Authors
  1. N. I. Klyui
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Additional information

Pis’ma Zh. Tekh. Fiz. 24, 87–92 (May 26, 1998)

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Klyui, N.I. Influence of nitrogen on the optical and mechanical properties of diamond-like carbon films. Tech. Phys. Lett. 24, 408–409 (1998). https://doi.org/10.1134/1.1262109

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  • DOI: https://doi.org/10.1134/1.1262109

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