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Stable current oscillations accompanying magnetron sputtering of oxide targets

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Abstract

Undamped total current oscillations were observed for the first time during dc magnetron sputtering of oxide ceramic targets. It was shown that these oscillations were caused by the continuous generation of atomic oxygen as a result of chemisorption-desorption processes at the surface of the target heated by ion bombardment. Oscillations of an attachment nature (similar to Trichel oscillations) were observed at low pressures (P=4×10−4 Torr).

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Authors and Affiliations

  1. Institute of Physics, Dagestan Scientific Center, Dagestan

    A. Kh. Abduev & A. M. Magomedov

Authors
  1. A. Kh. Abduev
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  2. A. M. Magomedov
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Additional information

Pis’ma Zh. Tekh. Fiz. 24, 58–62 (March 12, 1998)

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Abduev, A.K., Magomedov, A.M. Stable current oscillations accompanying magnetron sputtering of oxide targets. Tech. Phys. Lett. 24, 192–193 (1998). https://doi.org/10.1134/1.1262048

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  • DOI: https://doi.org/10.1134/1.1262048

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