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Formation of a diamond-like phase under conditions of preferential deposition of nondiamond carbon in a microwave gas discharge plasma with electron cyclotron resonance

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Abstract

Films with crystallite sizes up to approximately 0.5 μm were obtained. Results of complex investigations of these films are presented.

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Authors and Affiliations

  1. Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Saratov Branch, Saratov

    S. Yu. Suzdal’tsev, S. V. Sysuev & R. K. Yafarov

Authors
  1. S. Yu. Suzdal’tsev
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  2. S. V. Sysuev
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  3. R. K. Yafarov
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Additional information

Pis’ma Zh. Tekh. Fiz. 24, 25–31 (February 26, 1998)

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Suzdal’tsev, S.Y., Sysuev, S.V. & Yafarov, R.K. Formation of a diamond-like phase under conditions of preferential deposition of nondiamond carbon in a microwave gas discharge plasma with electron cyclotron resonance. Tech. Phys. Lett. 24, 135–137 (1998). https://doi.org/10.1134/1.1262024

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  • DOI: https://doi.org/10.1134/1.1262024

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