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Laser interferometer with fine-focused beams to monitor the spatial position of an object

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Abstract

Analogies with interferometers using a light source with low temporal coherence are used to analyze the principles of the construction of laser interferometers with averaging over the photodetector aperture, whose sensitivity to the position of an object being monitored at the maximum of the output signal is as good as that of low-coherence interferometry and tomography.

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Pis’ma Zh. Tekh. Fiz. 24, 19–24 (February 26, 1998)

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Ryabukho, V.P., Khomutov, V.L., Lyakin, D.V. et al. Laser interferometer with fine-focused beams to monitor the spatial position of an object. Tech. Phys. Lett. 24, 132–134 (1998). https://doi.org/10.1134/1.1262023

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  • DOI: https://doi.org/10.1134/1.1262023

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