Abstract
Cadmium oxide films obtained by magnetron sputtering of a cadmium target in a nitrogenoxygen mixture are investigated. It is established that these films have a lower resistivity than do films obtained by other methods. It is concluded that the practical utilization of CdO films as transparent electrodes would be worthwhile.
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References
H. Hartnagel, A. L. Dawar, A. K. Jain et al., Semiconducting Transparent Thin Films, Institute of Physics, Bristol-Philadelphia (1995), p. 358.
S. P. Singh and A. K. Sharma, Thin Solid Films 105, 131 (1982).
G. B. Webb and D. F. Williams, Appl. Phys. Lett. 39, 640 (1981).
T. L. Chu and S. S. Chu, J. Electron. Mater. 19(9), (1990).
C. Scavani and K. T. R. Reddy, J. Alloys Compd. 215, 239 (1994).
V. E. Kondrashov, The Optics of Photocathodes [in Russian], Nauka, Moscow (1976).
F. A. Kroger, The Chemistry of Imperfect Crystals, North Holland, Amsterdam; Wiley, New York (1964); Mir, Moscow (1969).
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S. A. Vekshinski\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) State Scientific-Research Institute of Vacuum Technology
Pis’ma Zh. Tekh. Fiz. 23, 70–74 (October 26, 1997)
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Baranov, A.M., Malov, Y.A., Teryoshin, S.A. et al. Investigation of the properties of CdO films. Tech. Phys. Lett. 23, 805–806 (1997). https://doi.org/10.1134/1.1261808
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DOI: https://doi.org/10.1134/1.1261808