Abstract
The effusion of hydrogen and other gases from an amorphous carbon a-C:H film annealed at temperatures of 100–1000°C was studied. A direct method was used to determine the amount of hydrogen in the material as 26 at.%. The amount of free hydrogen was determined as 4 at.%. The temperature curve for the release of free hydrogen gas has a maximum at 400 °C. A broad hydrogen effusion peak was observed above 400 °C. The amount of hydrogen released by breaking of weak C-H bonds was determined as 10 at.% and that released by breaking of strong C-H bonds was determined as 12 at.%.
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Pis’ma Zh. Tekh. Fiz. 23, 3–8 (January 12, 1997)
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Kon’kov, O.I., Kapitonov, I.N., Trapeznikova, I.N. et al. Measurement of the amount of free and bound hydrogen in amorphous carbon. Tech. Phys. Lett. 23, 9–10 (1997). https://doi.org/10.1134/1.1261626
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DOI: https://doi.org/10.1134/1.1261626