Abstract
The self-consistent problem of a an intermediate-pressure rf capacitive discharge in a long strip line is analyzed with allowance for heating of the gas. Steady-state distributions of the discharge parameters along the line are derived. It is shown that the discharge burns in certain regions, whose lengths and locations depend on the amplitude of the applied voltage.
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References
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Yu. P. Raizer, M. N. Shneider, and N. A. Yatsenko, Radio-Frequency Capacitive Discharges (Nauka and MFTI, Moscow, 1995).
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Pis’ma Zh. Tekh. Fiz. 23, 64–70 (January 26, 1997)
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Raizer, Y.P., Schneider, M.N. Localization of an rf capacitive discharge in a long strip line. Tech. Phys. Lett. 23, 75–77 (1997). https://doi.org/10.1134/1.1261622
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DOI: https://doi.org/10.1134/1.1261622