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Radiation-assisted formation of microprobes for scanning tunnel microscopes

  • Surfaces, Electron and Ion Emission
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Abstract

The formation of tipped tungsten microprobes by ion bombardment in high electric fields with subsequent low-temperature field evaporation is reported. During irradiation, the current density was shown to rise nonmonotonically because of heavy particles present in the bombarding beam due to emitter erosion. It was found that the initially hemispheric working part of the probes turns into the axially symmetric complex-shaped surface. A correlation of these effects with inert gas ionization and tungsten sputtering under the action of super-high-density electron beams is discussed. The atomically smooth microprobes obtained by ion bombardment and field evaporation offer high stability and an atomic-level resolution.

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References

  1. S. N. Magonov and M.-H. Whangbo, Surface Analysis with STM and AFM (Springer, Berlin, 1996).

    Google Scholar 

  2. V. A. Ksenofontov, I. M. Mikhailovskii, V. M. Shulaev, et al., Physics, Chemistry, and Application of Nanostructures, Ed. by V. E. Borisenko et al. (Belarussian State Univ. of Informatics and Radioelectronics, Minsk, 1995), pp. 244–245.

    Google Scholar 

  3. L. Libioulle, Rev. Sci. Instrum. 66, 97 (1995).

    Article  ADS  Google Scholar 

  4. H. Rohrer, Jpn. J. Appl. Phys. 32, 1335 (1993).

    Article  Google Scholar 

  5. S. Kondo, S. Heike, M. Lutwyche, et al., Appl. Phys. 78, 155 (1995).

    Google Scholar 

  6. P. A. Bereznyak and V. V. Slezov, Radiotekh. Électron. 17, 354 (1972).

    Google Scholar 

  7. P. A. Bereznyak, O. A. Velikodnaya, V. I. Gerasimenko, et al., Vopr. At. Nauki Tekh., Ser. Fiz. Radiatsionnykh Povrezhdeni\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Radiatsionnoe Materialovedenie, No. 1, 41 (1994).

  8. M. K. Miller and G. D. W. Smith, Atom Probe Microanalysis: Principles and Applications to Materials Problems (Oak Ridge National Lab., 1987; Mir, Moscow, 1993).

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Authors and Affiliations

  1. Ukrainian Scientific Center, Kharkov Institute of Physics and Technology, Akademicheskaya ul. 1, Kharkov, 310108, Ukraine

    T. I. Mazilova

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  1. T. I. Mazilova
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__________

Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 70, No. 2, 2000, pp. 102–105.

Original Russian Text Copyright © 2000 by Mazilova.

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Mazilova, T.I. Radiation-assisted formation of microprobes for scanning tunnel microscopes. Tech. Phys. 45, 243–246 (2000). https://doi.org/10.1134/1.1259605

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  • DOI: https://doi.org/10.1134/1.1259605

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